Integrated AlN/diamond heat spreaders for silicon device processing
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 2002
ISSN: 0734-2101
DOI: 10.1116/1.1513643